This industrial excimer laser processing system is designed for high-precision microfabrication, semiconductor annealing, and thin-film patterning. It supports full integration into automated production lines with real-time monitoring. The system features a gas-sealed excimer source with long lifetime optics and AI-assisted process control.

• Excimer laser source unit
• Beam shaping & homogenization module
• High-speed XY scanning stage or mask projection unit
• Inline substrate handling robot (customizable track width)
• Exhaust & gas management system
• Process control PC with recipe manager

• Silicon annealing for advanced displays (LTPS)
• MEMS & semiconductor wafer dicing
• Polymer surface activation
• Medical device micro-structuring
• Flexible PCB drilling

We offer full customization of wavelength selection, pulse energy, scanning field size, gas mixture, cooling method (air/water/chiller), and production line communication protocol. Customized beam delivery arms and class-1 enclosures are also available upon request.

• > 2000 hours gas lifetime (optimized gas mixture)
• Built-in energy stabilization (real-time feedback)
• Remote diagnostics & predictive maintenance
• Low cost of ownership (LOO) with bypass gas-saving mode
• Compact modular design for quick line reconfiguration

• 24/7 technical support (phone/remote)
• On-site installation & production line integration
• Custom training for your engineers
• Extended warranty up to 5 years
• Gas refill & optics refurbishment program

• Sealed in moisture-controlled, shock-dampened container
• Vacuum-sealed optics box
• Shipping via air or sea with real-time tracking
• Export crates meet ISPM-15 standard